Ion beam shaping and downsizing of nanostructures

TL;DR

This paper introduces a precise ion beam technique for gradually shrinking nanostructures below 10 nm, allowing controlled shape modification and surface polishing, with applications in studying size-dependent phenomena.

Contribution

The paper presents a novel ion beam method for controlled downsizing and shaping of nanostructures with nanometer accuracy, enabling new experimental studies.

Findings

Achieved ~1 nm accuracy in nanostructure downsizing.

Enabled controlled shape and surface polishing of nanostructures.

Facilitated study of size-dependent phenomena on the same sample.

Abstract

We report a new approach for progressive and well-controlled downsizing of nanostructures below the 10 nm scale. Low energetic ion beam (Ar+) is used for gentle surface erosion, progressively shrinking the dimensions with ~ 1 nm accuracy. The method enables shaping of nanostructure geometry and polishing the surface. The process is clean room / high vacuum compatible being suitable for various applications. Apart from technological advantages, the method enables study of various size phenomena on the same sample between sessions of ion beam treatment.