Micro-Hotplates for Thermal Characterisation of Structural Materials of Mems

TL;DR

This paper presents a method for determining the thermal properties of silicon-nitride and diamond layers in MEMS by analyzing the thermal responses of a multilayer micro-heater structure, aiding in better MEMS design.

Contribution

It introduces a novel approach to extract thermal properties of MEMS materials using micro-hotplates and thermal response analysis.

Findings

Thermal properties of silicon-nitride and diamond layers were successfully characterized.

The method accounts for size effects and structural complexities.

Results improve the accuracy of thermal modeling in MEMS design.

Abstract

Accurate knowledge of mechanical and thermal properties of structural materials used in MEMS is essential for optimum geometric and functional design. The extraction of precise physical properties is rather complicated due to the size effects, the complexity of the structures and the variations of formation processes. This work is intended to determine the thermal properties of silicon-nitride and diamond layers applied in thermal sensor structures by analyzing thermal responses of a multilayer micro-heater structure.