Model of Electrostatic Actuated Deformable Mirror Using Strongly Coupled Electro-Mechanical Finite Element

TL;DR

This paper presents a finite element model for simulating strongly coupled electro-mechanical interactions in electrostatically actuated deformable micro-mirrors, enabling accurate static and transient analysis of MEMS devices.

Contribution

It introduces a coupled FEM approach to model electro-mechanical interactions in MEMS, addressing the challenges of strong coupling effects at microscopic scales.

Findings

Successful static and transient simulations of micro-mirror behavior.

Effective handling of large mesh displacements in coupled analysis.

Enhanced understanding of electrostatic actuation in MEMS.

Abstract

The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in which electric as well as mechanical and fluid phenomena appear and interact. Because of their microscopic scale, strong coupling effects arise between the different physical fields, and some forces, which were negligible at macroscopic scale, have to be taken into account. In order to accurately design such micro-electro-mechanical systems, it is of primary importance to be able to handle the strong coupling between the electric and the mechanical fields. In this paper, the finite element method (FEM) is used to model the strong coupled electro-mechanical interactions and to perform static and transient analyses taking into account large mesh displacements. These analyses will be used to study the behaviour of electrostatically actuated micro-mirrors.