Reduced-Order Modelling of the Bending of an Array of Torsional Micromirrors

TL;DR

This paper introduces a semi-analytical reduced-order model for predicting the bending behavior of an array of torsional micromirrors used in optical switching, validated against detailed FEM simulations.

Contribution

It presents a novel semi-analytical method that accounts for flexural deformation in micromirror static analysis, improving modeling accuracy.

Findings

Model accurately predicts micromirror bending behavior.

Validation shows good agreement with FEM simulations.

Method enhances design capabilities for micromirror arrays.

Abstract

Reduced-Order Modelling of the Bending of an Array of An array of micromirrors for beam steering optical switching has been designed in a thick polysilicon technology. A novel semi-analytical method to calculate the static characteristics of the micromirrors by taking into account the flexural deformation of the structure is presented. The results are compared with 3D coupled-field FEM simulation.