A Ku-Band Novel Micromachined Bandpass Filter with Two Transmission Zeros

TL;DR

This paper introduces a compact Ku-band micromachined bandpass filter with two transmission zeros, achieving improved selectivity and lower insertion loss through a novel design and fabrication techniques.

Contribution

A new interdigital filter design method that creates and shifts transmission zeros arbitrarily, enhancing filter performance and miniaturization.

Findings

Achieved better skirt rejection and lower insertion loss.

Successfully fabricated and measured a silicon-based eight-order filter.

Demonstrated effective zero placement for performance optimization.

Abstract

This paper presents a micromachined bandpass filter with miniature size that has relatively outstanding performance. A silicon-based eight-order microstrip bandpass filter is fabricated and measured. A novel design method of the interdigital filter that can create two transmission zeros is described. The location of the transmission zeros can be shifted arbitrarily in the stopband. By adjusting the zero location properly, the filter provides much better skirt rejection and lower insertion loss than a conventional microstrip interdigital filter. To reduce the chip size, through-silicon-substrate-via-hole is used. Good experimental results are obtained.