Packaging of RF Mems Switching Functions on Alumina Substrate
M.-K. El Khatib (XLIM), A. Pothier (XLIM), P. Blondy (XLIM)

TL;DR
This paper discusses the importance of packaging technologies for RF MEMS switching devices on alumina substrates to facilitate their commercial deployment in wireless communication systems.
Contribution
It highlights the critical role of packaging solutions in advancing RF MEMS devices for practical wireless applications.
Findings
Packaging impacts RF MEMS device performance
Alumina substrates are suitable for RF MEMS packaging
Addressing packaging challenges accelerates commercialization
Abstract
Recently the strong demands in wireless communication requires expanding development for the application of RF MEMS (Radio Frequency micro electro mechanical systems) sensing devices such as micro-switches, tunable capacitors because it offers lower power consumption, lower losses, higher linearity and higher Q factors compared with conventional communications components. To accelerate commercialisation of RF MEMS products, development for packaging technologies is one of the most critical issues should be solved beforehand.
Peer Reviews
No public reviews on file for this paper yet. If you reviewed it on a platform where reviews are public (OpenReview, ICLR, NeurIPS, ICML), you can paste yours below so the community can read it here.
Videos
No videos yet. Explain this paper in a talk, walkthrough, or lecture? Add one.
Taxonomy
Topics3D IC and TSV technologies · Semiconductor materials and devices · Radio Frequency Integrated Circuit Design
