Above Ic Micro-Power Generators for RF-Mems

TL;DR

This paper discusses the development of micro power generators for RF-MEMS, focusing on miniaturization and integration of electrochemical energy conversion methods compatible with microelectronics fabrication processes.

Contribution

It introduces a novel micro-fabrication process for micro power generators that are compatible with RF-MEMS and above IC technologies, enabling miniaturized high-voltage energy sources.

Findings

Achieved micro power generator units with 100x100 μm^2 active area.

Developed fabrication processes in a clean room environment.

Demonstrated integration potential with RF-MEMS systems.

Abstract

This work presents recent advances in the development and the integration of an electrochemical (chemicalelectrical energy conversion) micro power generator used as a high voltage energy source for RF-MEMS powering. Autonomous MEMS require similarly miniaturized power sources. Up to day, solid state thin film batteries are realized with mechanical masks. This method doesn't allow dimensions below a few mm^2 active area, and besides the whole process flow is done under controlled atmosphere so as to ensure materials chemical stability (mainly lithiated materials). Within this context, Microelectronics micro-fabrication procedures (photolithography, Reactive Ion Etching...) are used to reach both miniaturisation (100x100 $\mu$m^2 targeted unit cell active area) and Above IC technological compatibility. All process steps developed here are realized in clean room environment.