High quality factor gigahertz frequencies in nanomechanical diamond resonators

TL;DR

This paper demonstrates gigahertz-range resonance frequencies in nano-crystalline diamond nanomechanical resonators, achieving high quality factors and frequency enhancements over silicon, with potential applications in high-frequency nanomechanical systems.

Contribution

The study introduces a novel coupled-beam resonator design in nano-crystalline diamond that reaches gigahertz frequencies with high quality factors, surpassing previous silicon-based devices.

Findings

Resonance frequencies up to 1.441 GHz achieved.

Quality factors exceed 20,000 above 500 MHz.

Nano-crystalline diamond enhances frequency performance threefold over silicon.

Abstract

We report actuation and detection of gigahertz-range resonance frequencies in nano-crystalline diamond mechanical resonators. High order transverse vibration modes are measured in coupled-beam resonators exhibiting frequencies up to 1.441 GHz. The cantilever-array design of the resonators translates the gigahertz-range resonant motion of micron-long cantilever elements to the displacement of the central supporting structure. Use of nano-crystalline diamond further increases the frequency compared to single crystal silicon by a factor of three. High clamping losses usually associated with micron-sized straight beams are suppressed in the periodic geometry of our resonators, allowing for high quality factors exceeding 20,000 above 500 MHz.