Fabrication, Dynamics, and Electrical Properties of Insulated SPM Probes for Electrical and Electromechanical Imaging in Liquids

TL;DR

This paper reports the fabrication and analysis of insulated cantilever probes with high aspect ratio conducting tips for electrical and electromechanical imaging in liquids, highlighting their enhanced properties and applications.

Contribution

It introduces a novel fabrication process for insulated probes with a tungsten tip and analyzes their dynamic and electrical properties for imaging applications.

Findings

Increased stiffness and Q-factor after modification

Resonance frequencies shifted to higher values

Successful application in ferroelectric domain imaging

Abstract

Insulated cantilever probes with a high aspect ratio conducting apex have been fabricated and their dynamic and electrical properties analyzed. The cantilevers were coated with silicon dioxide and a via was fabricated through the oxide at the tip apex and backfilled with tungsten to create an insulated probe with a conducting tip. The stiffness and Q-factor of the cantilevers increased after the modifications and their resonances shifted to higher frequencies. The coupling strength between the cantilever and the coating are determined. The applications to conductive and electromechanical imaging of ferroelectric domains are illustrated, and a probe apex repair process is demonstrated.