Conformal oxide coating of Carbon Nanotubes
S. Kawasaki, G. Catalan, H. Fan, M. M. Saad, J. M. Gregg, M. A., Correa-Duarte, J. Rybczynski, F. D. Morrison, T. Tatsuta, O. Tsuji, and J. F., Scott
TL;DR
This paper demonstrates the first successful integration of high-dielectric oxide films onto carbon nanotube electrodes, advancing the potential for ultra-high-density ferroelectric memory applications.
Contribution
It introduces a novel method for conformally coating carbon nanotubes with high-dielectric oxides, enabling higher integration density in ferroelectric memories.
Findings
Successful conformal coating of oxide films on nanotubes
Potential for ultra-high-density FeRAMs
Alignment with roadmap requirements for 3D integration
Abstract
The International Roadmap for Ferroelectric Memories requires three-dimensional integration of high-dielectric materials onto metal interconnects or bottom electrodes by 2010. We report the first integration of high-dielectric oxide films onto carbon nanotube electrodes with an aim of ultra-high integration density of FeRAMs (Tb/in2).
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