Radio-frequency discharges in Oxygen. Part 1: Modeling

TL;DR

This paper introduces a particle-in-cell Monte-Carlo model for radio-frequency oxygen discharges, incorporating plasma-chemical reactions and validating results against experimental data to improve understanding of discharge behavior.

Contribution

It presents a comprehensive modeling approach that combines space charge, transport, and plasma-chemical reactions for oxygen discharges, with validation against experiments.

Findings

Model accurately predicts electron and ion densities.

Good agreement with experimental measurements.

Provides a validated framework for oxygen discharge simulation.

Abstract

In this series of three papers we present results from a combined experimental and theoretical effort to quantitatively describe capacitively coupled radio-frequency discharges in oxygen. The particle-in-cell Monte-Carlo model on which the theoretical description is based will be described in the present paper. It treats space charge fields and transport processes on an equal footing with the most important plasma-chemical reactions. For given external voltage and pressure, the model determines the electric potential within the discharge and the distribution functions for electrons, negatively charged atomic oxygen, and positively charged molecular oxygen. Previously used scattering and reaction cross section data are critically assessed and in some cases modified. To validate our model, we compare the densities in the bulk of the discharge with experimental data and find good agreement, indicating that essential aspects of an oxygen discharge are captured.